LOCAL IN-DEPTH ANALYSIS OF CERAMIC MATERIALS BY NEUTRAL BEAM SECONDARY ION MASS-SPECTROMETRY

被引：33

作者：

BORCHARDT, G ^{[1
]}

SCHERRER, H ^{[1
]}

WEBER, S ^{[1
]}

SCHERRER, S ^{[1
]}

机构：

[1] ECOLE NATL SUPER MET & IND MINES,PHYS SOLIDES LAB,F-54042 NANCY,FRANCE

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1980年 / 34卷 / 3-4期

关键词：

D O I：

10.1016/0020-7381(80)85049-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

页码：361 / 373

页数：13

共 50 条

[1] SECONDARY ION MASS-SPECTROMETRY FOR CERAMIC MATERIALS
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[J]. MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK, 1990, 21 (03) : 140 - 141
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 297 - 297
[5] A SCANNED MICROFOCUSED NEUTRAL BEAM FOR USE IN SECONDARY ION MASS-SPECTROMETRY
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[9] DEPTH INFORMATION BY SECONDARY ION MASS-SPECTROMETRY
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[J]. MIKROCHIMICA ACTA, 1974, : 411 - 420
[10] DEPTH PROFILING BY SECONDARY ION MASS-SPECTROMETRY
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