SURFACE, IN-DEPTH, AND QUANTITATIVE-ANALYSIS BY SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：3

作者：

MORABITO, JM ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318601

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：297 / 297

页数：1

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