USE OF LOW-ENERGY ACCELERATORS FOR ION IMPLANTATION

被引：9
|
作者：
CRACKNELL, PJ
GETTINGS, M
STEPHENS, KG
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1971年 / 92卷 / 04期
关键词：
D O I：
10.1016/0029-554X(71)90097-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：465 / +
页数：1
相关论文
共 50 条
  • [31] Fabrication of metal nanoparticles in sapphire by low-energy ion implantation
    Stepanov, AL
    Khaibullin, IB
    REVIEWS ON ADVANCED MATERIALS SCIENCE, 2005, 9 (02) : 109 - 129
  • [32] ECRIS/EBIS Based Low-Energy Ion Implantation Technologies
    Zschornack, Guenter
    Laux, Paul-Friedmar
    Philipp, Alexandra
    Ritter, Erik
    Ravelosona, Dafine
    Schmidt, Mike
    2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018), 2018, : 168 - 171
  • [33] CHANNELING EFFECT FOR LOW-ENERGY ION-IMPLANTATION IN SI
    CHO, K
    ALLEN, WR
    FINSTAD, TG
    CHU, WK
    LIU, J
    WORTMAN, JJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 265 - 272
  • [34] Hydrogen passivation of silicon carbide by low-energy ion implantation
    Achtziger, N
    Grillenberger, J
    Witthuhn, W
    Linnarsson, MK
    Janson, MS
    Svensson, BG
    APPLIED PHYSICS LETTERS, 1998, 73 (07) : 945 - 947
  • [35] Low-energy BF2+ ion implantation in silicon
    Hirano, D
    Ishikawa, T
    Kitahara, M
    Inada, T
    REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY HOSEI UNIVERSITY, SUPPLEMENT NO.16, 1997, : 153 - 156
  • [36] LOW-ENERGY ION-IMPLANTATION IN POLYBITHIOPHENE - MICROSTRUCTURING AND MICROANALYSIS
    JUNG, KG
    SCHULTZE, JW
    ROBINSON, KS
    SCHMIEDEL, H
    FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1995, 353 (3-4): : 282 - 289
  • [37] RECENT ADVANCES IN DESIGN FOR LOW-ENERGY AND MEDIUM-ENERGY HEAVY-ION ACCELERATORS
    MARTIN, JA
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (03) : 3645 - 3652
  • [38] DISTRIBUTION OF DEPOSITED ENERGY BY LOW-ENERGY ION-IMPLANTATION IN COMPOUND MATERIALS
    JIANG, BY
    DAI, R
    VACUUM, 1989, 39 (2-4) : 331 - 333
  • [39] Application of low-energy accelerators in electronuclear systems
    Barashenkov, VS
    Polanski, A
    Sosnin, AN
    KERNTECHNIK, 1998, 63 (04) : 197 - 198
  • [40] NEUTRON POLARIZATION STUDIES WITH LOW-ENERGY ACCELERATORS
    GALLOWAY, RB
    NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 537 - &
12345