USE OF LOW-ENERGY ACCELERATORS FOR ION IMPLANTATION

被引：9
|
作者：
CRACKNELL, PJ
GETTINGS, M
STEPHENS, KG
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1971年 / 92卷 / 04期
关键词：
D O I：
10.1016/0029-554X(71)90097-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：465 / +
页数：1
相关论文
共 50 条
  • [21] STEERING AND MANIPULATION OF ION-BEAMS FOR LOW-ENERGY HEAVY-ION ACCELERATORS
    BEANLAND, DG
    FREEMAN, JH
    NUCLEAR INSTRUMENTS & METHODS, 1976, 139 (DEC15): : 33 - 39
  • [22] ACCELERATORS FOR LOW-ENERGY NUCLEAR PHYSICS
    不详
    NATURE, 1961, 192 (480) : 1239 - +
  • [23] VOLTAGE CALIBRATION OF LOW-ENERGY ACCELERATORS
    FREYE, T
    LORENZWIRZBA, H
    CLEFF, B
    TRAUTVETTER, HP
    ROLFS, C
    ZEITSCHRIFT FUR PHYSIK A-HADRONS AND NUCLEI, 1977, 281 (03): : 211 - 218
  • [24] THE DEVELOPMENT OF LOW-ENERGY ACCELERATORS IN CHINA
    WU, SQ
    FANG, CW
    RADIATION PHYSICS AND CHEMISTRY, 1983, 22 (3-5): : 391 - 394
  • [25] Low-energy Fe+ ion implantation into silicon nanostructures
    Markwitz, Andreas
    Kant, Krishna
    Carder, Damian
    Johnson, Peter B.
    ADVANCED MATERIALS AND NANOTECHNOLOGY, PROCEEDINGS, 2009, 1151 : 149 - 152
  • [26] LOW-ENERGY ION-IMPLANTATION AND ITS CHARACTERIZATION AND PROCESSING
    DOWNEY, DF
    EDDY, RJ
    MEHTA, S
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 74 (1-2): : 160 - 169
  • [27] DEFECT FORMATION IN LIF BY LOW-ENERGY ION-IMPLANTATION
    AFONSO, CN
    ORTIZ, C
    CLARK, GJ
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 131 (01): : 87 - 96
  • [28] A novel approach to microbial breeding - low-energy ion implantation
    Gu, Shao-bin
    Li, Shi-chang
    Feng, Hui-yun
    Wu, Ying
    Yu, Zeng-liang
    APPLIED MICROBIOLOGY AND BIOTECHNOLOGY, 2008, 78 (02) : 201 - 209
  • [29] A novel approach to microbial breeding—low-energy ion implantation
    Shao-bin Gu
    Shi-chang Li
    Hui-yun Feng
    Ying Wu
    Zeng-liang Yu
    Applied Microbiology and Biotechnology, 2008, 78 : 201 - 209
  • [30] LOW-ENERGY ION-IMPLANTATION STUDIES OF POLYACETYLENE FILMS
    KOSHIDA, N
    SUZUKI, Y
    AOYAMA, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 708 - 711
12345