ELECTRON-OPTICAL CONSIDERATIONS FOR HIGH-SPEED E-BEAM TESTING

被引：0
|
作者：
BRUNNER, M
WINKLER, D
SCHMITT, R
LISCHKE, B
WEGER, P
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1988年 / 93期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Electron-pulse generation for GHz e-beam testing requires optimization of both, the blanking system and the probe-forming electron optics. An e-beam test system has been developed to allow propagation delay measurements in the 1 ps range and to resolve signal rise times larger than 15ps.
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页码：59 / 60
页数：2
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