CONTROL COMPOSITION STUDY OF SPUTTERED NI-TI SHAPE-MEMORY ALLOY FILM

被引：26
|
作者：
BENDAHAN, M
CANET, P
SEGUIN, JL
CARCHANO, H
机构：
[1] Laboratoire d'Electronique et de Physico-chimie des Couches Minces, Faculté des Sciences de Saint-Jérôme, Service A62
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1995年 / 34卷 / 2-3期
关键词：
SHAPE MEMORY ALLOY; SPUTTERING; THIN FILM; NI-TI;
D O I：
10.1016/0921-5107(95)01237-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Since the transition temperature of the shape memory effect in NixTi1-x films depends on the composition of the layer, it is indispensable to have an accurate control on their composition. We are now able to control in situ the composition of r.f. sputtered Ni-Ti films in the whole domain of shape memory effect (0.476 < x < 0.531). by varying the product of sputtering gas pressure P and target-to-substrate distance d. Pressure measurements are found to give a good sensitivity for the control of Ti-rich layers, while the optical emission spectroscopy of the sputtering plasma gives better sensitivity for Ni-rich layers.
引用
收藏
页码：112 / 115
页数：4
相关论文
共 50 条
  • [41] Dynamic DNA to dynamic architecture (with Ni-Ti shape memory alloy)
    Villalon, Rachelle
    CAADRIA 2007: Proceedings of the 12th International Conference on Computer-Aided Architectural Design Research in Asia: DIGITIZATION AND GLOBALIZATION, 2007, : 345 - 352
  • [42] Heat treatment of Ni-Ti alloy for improvement of shape memory effect
    Sadrnezhaad, K
    Mashhadi, F
    Sharghi, R
    MATERIALS AND MANUFACTURING PROCESSES, 1997, 12 (01) : 107 - 115
  • [43] EVALUATION OF RECOVERY BENDING FORCE OF SHAPE MEMORY NI-TI ALLOY
    FURUYA, Y
    SHIMADA, H
    TANAHASHI, Y
    MATSUMOTO, M
    HONMA, T
    SCRIPTA METALLURGICA, 1988, 22 (06): : 751 - 755
  • [44] Grown crystalline Ni-Ti shape memory alloy thin films
    Mohanchandra, KP
    Carman, GP
    SMART STRUCTURES AND MATERIALS 2003: ACTIVE MATERIALS: BEHAVIOR AND MECHANICS, 2003, 5053 : 212 - 218
  • [45] THE LATTICE INVARIANT SHEAR IN NI-TI SHAPE MEMORY ALLOY MARTENSITES
    MADANGOPAL, K
    BANERJEE, R
    SCRIPTA METALLURGICA ET MATERIALIA, 1992, 27 (11): : 1627 - 1632
  • [46] IR thermography and resistivity investigations on Ni-Ti Shape Memory Alloy
    Costanza, Girolamo
    Paoloni, Stefano
    Tata, Maria Elisa
    MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS III, 2014, 605 : 23 - 26
  • [47] XPS characterisation of surface modified Ni-Ti shape memory alloy
    Green, SM
    Grant, DM
    Wood, JV
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1997, 224 (1-2): : 21 - 26
  • [48] STRETCH FORMED Ni-Ti SHAPE MEMORY ALLOY SHEET PART
    Fann Kuang-Jau
    Su Jhe-Yung
    METAL 2016: 25TH ANNIVERSARY INTERNATIONAL CONFERENCE ON METALLURGY AND MATERIALS, 2016, : 356 - 359
  • [49] THE ORIENTATION DEPENDENCE OF THE RECOVERABLE SHAPE MEMORY STRAIN IN A NI-TI ALLOY
    CIZEK, P
    KOVOVE MATERIALY-METALLIC MATERIALS, 1989, 27 (01): : 98 - 108
  • [50] Unnotched fatigue behavior of an austenitic Ni-Ti shape memory alloy
    Nayan, N.
    Roy, D.
    Buravalla, V.
    Ramamurty, U.
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 497 (1-2): : 333 - 340
12345