CONTROL COMPOSITION STUDY OF SPUTTERED NI-TI SHAPE-MEMORY ALLOY FILM

被引：26
|
作者：
BENDAHAN, M
CANET, P
SEGUIN, JL
CARCHANO, H
机构：
[1] Laboratoire d'Electronique et de Physico-chimie des Couches Minces, Faculté des Sciences de Saint-Jérôme, Service A62
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1995年 / 34卷 / 2-3期
关键词：
SHAPE MEMORY ALLOY; SPUTTERING; THIN FILM; NI-TI;
D O I：
10.1016/0921-5107(95)01237-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Since the transition temperature of the shape memory effect in NixTi1-x films depends on the composition of the layer, it is indispensable to have an accurate control on their composition. We are now able to control in situ the composition of r.f. sputtered Ni-Ti films in the whole domain of shape memory effect (0.476 < x < 0.531). by varying the product of sputtering gas pressure P and target-to-substrate distance d. Pressure measurements are found to give a good sensitivity for the control of Ti-rich layers, while the optical emission spectroscopy of the sputtering plasma gives better sensitivity for Ni-rich layers.
引用
收藏
页码：112 / 115
页数：4
相关论文
共 50 条
  • [31] Powder metallurgical processing of Ni-Ti shape memory alloy
    Green, SM
    Grant, DM
    Kelly, NR
    POWDER METALLURGY, 1997, 40 (01) : 43 - 47
  • [32] Powder metallurgical processing of Ni-Ti shape memory alloy
    Univ of Nottingham, Nottingham, United Kingdom
    Powder Metall, 1 (43-47):
  • [33] Lowering the Power Consumption of Ni-Ti Shape Memory Alloy
    Villanueva, Alex
    Gupta, Shashaank
    Priya, Shashank
    BEHAVIOR AND MECHANICS OF MULTIFUNCTIONAL MATERIALS AND COMPOSITES 2012, 2012, 8342
  • [34] Solidification of Ni-Ti shape memory alloy: Modeling and simulation
    Carvalho L.C.
    De Lima A.G.B.
    Calazans Duarte R.N.
    Moreira G.
    De Brito M.K.T.
    Queiroz R.A.
    Defect and Diffusion Forum, 2019, 391 : 136 - 141
  • [35] Tailoring the actuation characteristics of Ni-Ti shape memory alloy/ polyimide thin film composites
    Narayane, Dhiraj
    Taiwade, Ravindra V.
    COMPOSITES COMMUNICATIONS, 2025, 53
  • [36] STUDY OF NANOMECHANICAL PROPERTIES OF Ni-Ti SHAPE MEMORY ALLOY BY INSTRUMENTED INDENTATION TECHNIQUE
    Sinha, Arijit
    Datta, Shubhabrata
    Chattopadhyay, Partha Protim
    INTERNATIONAL JOURNAL OF NANOSCIENCE, 2011, 10 (4-5) : 955 - 959
  • [37] A Strain Rate Effect of Ni-Ti Shape Memory Alloy Wire
    Kim, Sanghaun
    Cho, Maenghyo
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (11)
  • [38] Thermal characteristics of Ni-Ti SMA (shape memory alloy) actuators
    Degeratu, Sonia
    Rotaru, P.
    Manolea, Gh.
    Manolea, H. O.
    Rotaru, A.
    JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY, 2009, 97 (02) : 695 - 700
  • [39] Transformation induced toughening in a Ni-Ti 52 shape memory alloy
    López, HF
    MATERIALS LETTERS, 2001, 51 (02) : 144 - 150
  • [40] Characterization of Polylactide Layer Deposited on Ni-Ti Shape Memory Alloy
    Goryczka, Tomasz
    Szaraniec, Barbara
    JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2014, 23 (07) : 2682 - 2686
12345