EVIDENCE OF HOLE INJECTION AND TRAPPING IN SILICON NITRIDE FILMS PREPARED BY REACTIVE SPUTTERING

被引：93

|

作者：

HU, SM

KERR, DR

GREGOR, LV

机构：

来源：

APPLIED PHYSICS LETTERS | 1967年 / 10卷 / 03期

关键词：

D O I：

10.1063/1.1754868

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：97 / &

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