EVIDENCE OF HOLE INJECTION AND TRAPPING IN SILICON NITRIDE FILMS PREPARED BY REACTIVE SPUTTERING

被引：93
|
作者：
HU, SM
KERR, DR
GREGOR, LV
机构：
来源：
APPLIED PHYSICS LETTERS | 1967年 / 10卷 / 03期
关键词：
D O I：
10.1063/1.1754868
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：97 / &
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