SILICON NITRIDE FILMS BY REACTIVE SPUTTERING

被引：0
|
作者：
HU, SM
GREGOR, LV
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 08期
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C213 / &
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