GRAIN-BOUNDARY DIFFUSION OF ALUMINUM IN POLYCRYSTALLINE SILICON FILMS

被引：40

作者：

HWANG, JCM ^{[1
]}

HO, PS ^{[1
]}

LEWIS, JE ^{[1
]}

CAMPBELL, DR ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 03期

关键词：

D O I：

10.1063/1.327811

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1576 / 1581

页数：6

共 50 条

[31] GRAIN-BOUNDARY SLIDING AND DIFFUSION CREEP IN POLYCRYSTALLINE SOLIDS
STEVENS, RN
PHILOSOPHICAL MAGAZINE, 1971, 23 (182): : 265 - &
[32] GRAIN-BOUNDARY DIFFUSION IN COLUMNAR STRUCTURE POLYCRYSTALLINE MATERIALS
RAGAIE, HF
ELECTRONICS LETTERS, 1983, 19 (08) : 294 - 295
[33] PASSIFICATION OF GRAIN-BOUNDARY ELECTRONIC STATES IN POLYCRYSTALLINE SILICON
SEAGER, CH
GINLEY, DS
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1979, 24 (03): : 401 - 401
[34] GRAIN-BOUNDARY SOLUTE INTERACTIONS IN POLYCRYSTALLINE SILICON AND GERMANIUM
SMITH, DA
GROVENOR, CRM
BATSON, PE
WONG, C
ULTRAMICROSCOPY, 1984, 14 (1-2) : 131 - 134
[35] Control of grain-boundary tunneling barriers in polycrystalline silicon
Kamiya, T
Durrani, ZAK
Ahmed, H
APPLIED PHYSICS LETTERS, 2002, 81 (13) : 2388 - 2390
[36] A CONDUCTION MODEL FOR SEMICONDUCTOR GRAIN-BOUNDARY SEMICONDUCTOR BARRIERS IN POLYCRYSTALLINE-SILICON FILMS
LU, NC
GERZBERG, L
LU, CY
MEINDL, JD
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (02) : 137 - 149
[37] GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS .1. ISOLATED GRAIN-BOUNDARY
GILMER, GH
FARRELL, HH
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 3792 - 3798
[38] GRAIN-BOUNDARY SEGREGATION, GRAIN-BOUNDARY SELF-DIFFUSION, AND GRAIN-BOUNDARY REACTIVITY IN SOLID-SOLUTIONS BASED ON ALUMINUM
GLIKMAN, EE
PRIIMAK, AN
RUSSIAN METALLURGY, 1991, (02): : 104 - 113
[39] GRAIN-BOUNDARY DIFFUSION OF GOLD IN NICKEL FILMS
GUPTA, D
ASAI, KW
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : C77 - C78
[40] Grain Boundary Junctions in Polycrystalline Silicon Films
Bogorosh, O. T.
Voronov, S. O.
Shmatko, I. O.
Shmatko, O. A.
METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 2013, 35 (02): : 187 - 197

← 1 2 3 4 5 →