REACTION-MECHANISM FOR FLUORINE ETCHING OF SILICON

被引：52
|
作者：
GARRISON, BJ [1 ]
GODDARD, WA [1 ]
机构：
[1] CALTECH,ARTHUR AMOS NOYES LAB CHEM PHYS,PASADENA,CA 91125
来源：
PHYSICAL REVIEW B | 1987年 / 36卷 / 18期
关键词：
D O I：
10.1103/PhysRevB.36.9805
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
下载
收藏
页码：9805 / 9808
页数：4
相关论文
共 50 条
  • [41] POLAROGRAPHIC INVESTIGATION OF ZIMMERMANN REACTION-MECHANISM
    BLASS, KG
    THIBERT, RJ
    CLINICAL CHEMISTRY, 1975, 21 (07) : 1023 - 1023
  • [42] ON THE ERLENMEYER-PLOCHL REACTION-MECHANISM
    KAVRAKOVA, IK
    KOLEVA, VV
    SIMOVA, EM
    KURTEV, BI
    DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE, 1984, 37 (05): : 601 - 604
  • [43] HYDRODESULFURIZATION OF THIOPHENIC COMPOUNDS - REACTION-MECHANISM
    KWART, H
    SCHUIT, GCA
    GATES, BC
    JOURNAL OF CATALYSIS, 1980, 61 (01) : 128 - 134
  • [44] REACTION-MECHANISM OF DICHLOROCARBENE WITH PYRROLES AND INDOLES
    FORCELLESE, ML
    GAMBACOR.A
    NICOLETT.R
    ATTI DELLA ACCADEMIA NAZIONALE DEI LINCEI RENDICONTI-CLASSE DI SCIENZE FISICHE-MATEMATICHE & NATURALI, 1972, 53 (06): : 569 - 576
  • [45] SIMPLIFICATION OF METHANE - OXYGEN REACTION-MECHANISM
    TSATSARONIS, G
    BRENNSTOFF-WARME-KRAFT, 1978, 30 (06): : 249 - 255
  • [46] NEW INSIGHTS INTO THE REACTION-MECHANISM OF GLUCOAMYLASE
    NATARAJAN, SK
    SIERKS, MR
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 142 - BIOT
  • [47] NEW DATA ON INDOLIZATION REACTION-MECHANISM
    KITAYEV, YP
    TROYEPOLSKAYA, TV
    KHIMIYA GETEROTSIKLICHESKIKH SOEDINENII, 1978, (08): : 1011 - 1027
  • [48] FLAME PROPAGATION WITH A SEQUENTIAL REACTION-MECHANISM
    MARGOLIS, SB
    MATKOWSKY, BJ
    SIAM JOURNAL ON APPLIED MATHEMATICS, 1982, 42 (06) : 1175 - 1188
  • [49] REACTION OF ATOMIC FLUORINE WITH SILICON
    NINOMIYA, K
    SUZUKI, K
    NISHIMATSU, S
    OKADA, O
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) : 1177 - 1182
  • [50] ALUMINA CARBONITRIDING - A REACTION-MECHANISM APPROACH
    MORESMAU, JM
    MARTY, F
    LEFORT, P
    BILLY, M
    JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1987, 84 (05) : R16 - R16
12345