RAPID ISOTHERMAL HEATING OF VLSI MOS DEVICES USING A SCANNING E-BEAM SOURCE

被引：0
|
作者：
RENSCH, DB [1 ]
CHEN, JY [1 ]
机构：
[1] HUGHES RES LABS,MALIBU,CA 90265
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C325 / C326
页数：2
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