MATHEMATICAL-MODELING OF THROUGH-HOLE-PLATING IN ELECTROCHEMICAL MICROFABRICATION

被引：7

|

作者：

CHERN, JWE ^{[1
]}

CHEH, HY ^{[1
]}

机构：

[1] COLUMBIA UNIV,DEPT CHEM ENGN & APPL CHEM,NEW YORK,NY 10027

来源：

CHEMICAL ENGINEERING COMMUNICATIONS | 1992年 / 114卷

关键词：

AXISYMMETRICAL FLOW; CYLINDRICAL GEOMETRY; VORTICITY; STREAM FUNCTION; FLOW SEPARATION;

D O I：

10.1080/00986449208936022

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

收藏

页码：175 / 189

页数：15

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