MATHEMATICAL-MODELING OF THROUGH-HOLE-PLATING IN ELECTROCHEMICAL MICROFABRICATION

被引：7
|
作者：
CHERN, JWE [1 ]
CHEH, HY [1 ]
机构：
[1] COLUMBIA UNIV,DEPT CHEM ENGN & APPL CHEM,NEW YORK,NY 10027
来源：
CHEMICAL ENGINEERING COMMUNICATIONS | 1992年 / 114卷
关键词：
AXISYMMETRICAL FLOW; CYLINDRICAL GEOMETRY; VORTICITY; STREAM FUNCTION; FLOW SEPARATION;
D O I：
10.1080/00986449208936022
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：175 / 189
页数：15
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