GROWTH OF HIGHLY ORIENTED TIN OXIDE THIN-FILMS BY LASER EVAPORATION DEPOSITION

被引：45
|
作者：
DAI, CM
SU, CS
CHUU, DS
机构：
[1] NATL TSING HUA UNIV,INST NUCL SCI,HSINCHU 300,TAIWAN
[2] NATL CHIAO TUNG UNIV,DEPT ELECTROPHYS,HSINCHU,TAIWAN
来源：
APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 18期
关键词：
D O I：
10.1063/1.103998
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Conducting and transparent thin films of tin oxide were prepared by the laser evaporation of an undoped powder-pressed polycrystalline tin oxide target onto unheated substrates. After characterizing these films, the results reveal that the films are highly oriented and with a grain size ∼0.2 μm. The nearly stoichiometric deposition of tin oxide films with deposition rates exceeding 24 Å per pulse was obtained by this method. The lowest resistivity obtained is 3.0×10-3 Ω cm. The visible transmittance (between 4000 and 7000 Å) is above 75%.
引用
收藏
页码：1879 / 1881
页数：3
相关论文
共 50 条
  • [21] HIGHLY ORIENTED POLYARYLENEVINYLENE THIN-FILMS
    TSUTSUI, T
    MURATA, H
    MOMII, T
    YOSHIURA, K
    TOKITO, S
    SAITO, S
    SYNTHETIC METALS, 1991, 41 (1-2) : 327 - 330
  • [22] HIGHLY ORIENTED THIN-FILMS OF POLY(TETRAFLUOROETHYLENE) AS A SUBSTRATE FOR ORIENTED GROWTH OF MATERIALS
    WITTMANN, JC
    SMITH, P
    NATURE, 1991, 352 (6334) : 414 - 417
  • [23] ORIENTED BARIUM HEXAFERRITE THIN-FILMS PREPARED BY PULSED LASER DEPOSITION
    DORSEY, P
    SEED, R
    VITTORIA, C
    CHRISEY, DB
    CAROSELLA, C
    LUBITZ, P
    HORWITZ, JS
    IEEE TRANSACTIONS ON MAGNETICS, 1992, 28 (05) : 3216 - 3218
  • [24] DEPOSITION AND CHARACTERIZATION OF SIC AND CORDIERITE THIN-FILMS GROWN BY PULSED LASER EVAPORATION
    CHEN, MY
    MURRAY, PT
    JOURNAL OF MATERIALS SCIENCE, 1990, 25 (11) : 4929 - 4932
  • [25] DEPOSITION OF STOICHIOMETRIC MOS2 THIN-FILMS BY PULSED LASER EVAPORATION
    DONLEY, MS
    MCDEVITT, NT
    HAAS, TW
    MURRAY, PT
    GRANT, JT
    THIN SOLID FILMS, 1989, 168 (02) : 335 - 344
  • [26] Growth of highly oriented zinc oxide thin films by plasma enhanced chemical vapor deposition
    Kim, Hee Joon
    Jang, Dong Young
    Shishodia, Prem Kumar
    Yoshida, Akira
    ADVANCED NONDESTRUCTIVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS, 2006, 321-323 : 1687 - 1690
  • [27] INDIUM TIN OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION
    MARUYAMA, T
    FUKUI, K
    THIN SOLID FILMS, 1991, 203 (02) : 297 - 302
  • [28] HETEROEPITAXIAL GROWTH OF HIGHLY CONDUCTIVE METAL-OXIDE RUO2 THIN-FILMS BY PULSED-LASER DEPOSITION
    JIA, QX
    WU, XD
    FOLTYN, SR
    FINDIKOGLU, AT
    TIWARI, P
    ZHENG, JP
    JOW, TR
    APPLIED PHYSICS LETTERS, 1995, 67 (12) : 1677 - 1679
  • [29] HIGHLY ORIENTED POLYAMIDE THIN-FILMS PREPARED BY VAPOR-DEPOSITION POLYMERIZATION
    KUBONO, A
    OKUI, N
    TANAKA, K
    UMEMOTO, S
    SAKAI, T
    THIN SOLID FILMS, 1991, 199 (02) : 385 - 393
  • [30] THE GROWTH AND STRUCTURE OF RF SPUTTERED INDIUM TIN OXIDE THIN-FILMS
    SREENIVAS, K
    MANSINGH, A
    APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 670 - 680
12345