OPTICAL-PROPERTIES AND GROWTH-PROCESS OF NI/CU BILAYER FILMS STUDIED BY IN-SITU ELLIPSOMETRY

被引：1
|
作者：
KAWAGOE, T
MIZOGUCHI, T
机构：
[1] Faculty of Science, Gakushuin University, Toshima-ku, Tokyo, 171
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 126卷 / 1-3期
关键词：
D O I：
10.1016/0304-8853(93)90681-Q
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Bilayer films of Ni/Cu were investigated by in-situ ellipsometry during deposition. The results were analyzed by a multiple reflection model with effective reflection coefficient at the interface which was affected by the intermixing of Ni and Cu.
引用
收藏
页码：538 / 540
页数：3
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