OPTICAL-PROPERTIES AND GROWTH-PROCESS OF NI/CU BILAYER FILMS STUDIED BY IN-SITU ELLIPSOMETRY

被引:1
|
作者
KAWAGOE, T
MIZOGUCHI, T
机构
[1] Faculty of Science, Gakushuin University, Toshima-ku, Tokyo, 171
关键词
D O I
10.1016/0304-8853(93)90681-Q
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bilayer films of Ni/Cu were investigated by in-situ ellipsometry during deposition. The results were analyzed by a multiple reflection model with effective reflection coefficient at the interface which was affected by the intermixing of Ni and Cu.
引用
收藏
页码:538 / 540
页数:3
相关论文
共 50 条