OPTICAL-PROPERTIES OF PD-NI MULTILAYERS BY SPECTROSCOPIC ELLIPSOMETRY

被引:5
|
作者
LOGOTHETIDIS, S [1 ]
BOULTADAKIS, S [1 ]
FLEVARIS, NK [1 ]
FUCHS, D [1 ]
机构
[1] MAX PLANCK GESELL,FRITZ HABER INST,W-1000 BERLIN 33,GERMANY
关键词
D O I
10.1016/0304-8853(91)90380-S
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Conventional and synchrotron radiation spectroscopic ellipsometry studies were performed on artificial compositionally modulated Pd(m)-Ni(n) multilayers. Both dielectric function and plasma frequency were found to depend on m and n while the (m + n)-dependence reminded the "supermodulus" behavior.
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收藏
页码:444 / 448
页数:5
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