LITHOGRAPHY AND RADIATION-CHEMISTRY OF EPOXY CONTAINING NEGATIVE ELECTRON RESISTS

被引：61
|
作者：
THOMPSON, LF [1 ]
FEIT, ED [1 ]
HEIDENRE.RD [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07914
来源：
POLYMER ENGINEERING AND SCIENCE | 1974年 / 14卷 / 07期
关键词：
D O I：
10.1002/pen.760140713
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：529 / 533
页数：5
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