DIFFUSION OF SILICON IN PD2SI DURING GROWTH

被引:4
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作者
COMRIE, CM
EGAN, JM
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D O I
10.1116/1.576084
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:1492 / 1496
页数:5
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