DIELECTRIC AND INTERFACE PROPERTIES OF PYROLYTIC ALUMINUM OXIDE FILMS ON SILICON SUBSTRATES

被引：12
|
作者：
DUFFY, MT
CARNES, JE
RICHMAN, D
机构：
来源：
METALLURGICAL TRANSACTIONS | 1971年 / 2卷 / 03期
关键词：
D O I：
10.1007/BF02662719
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
引用
收藏
页码：667 / +
页数：1
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