GRAIN-GROWTH IN ARSENIC-IMPLANTED POLYCRYSTALLINE SI

被引：3
|
作者：
ZHENG, LR [1 ]
HUNG, LS [1 ]
MAYER, JW [1 ]
机构：
[1] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 25期
关键词：
D O I：
10.1063/1.98972
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2139 / 2141
页数：3
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