MONTE-CARLO SIMULATIONS OF AMORPHOUS HYDROGENATED SILICON THIN-FILM GROWTH

被引：38
|
作者：
GLEASON, KK
WANG, KS
CHEN, MK
REIMER, JA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期
关键词：
D O I：
10.1063/1.337882
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2866 / 2873
页数：8
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