MONTE-CARLO SIMULATIONS OF AMORPHOUS HYDROGENATED SILICON THIN-FILM GROWTH

被引:38
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GLEASON, KK
WANG, KS
CHEN, MK
REIMER, JA
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10.1063/1.337882
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O59 [应用物理学];
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页码:2866 / 2873
页数:8
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