QUANTITATIVE-ANALYSIS OF IMPURITIES IN SILICIDE LAYERS WITH SIMS

被引：2

|

作者：

AVAU, D

VANDERVORST, W

MAES, HE

机构：

来源：

FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1987年 / 329卷 / 2-3期

关键词：

D O I：

10.1007/BF00469144

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

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页码：220 / 224

页数：5

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