QUANTITATIVE-ANALYSIS OF IMPURITIES IN SILICIDE LAYERS WITH SIMS

被引：2
|
作者：
AVAU, D
VANDERVORST, W
MAES, HE
机构：
来源：
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1987年 / 329卷 / 2-3期
关键词：
D O I：
10.1007/BF00469144
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：220 / 224
页数：5
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