A REVIEW OF CATHODIC ARC PLASMA DEPOSITION PROCESSES AND THEIR APPLICATIONS

被引：67
|
作者：
RANDHAWA, H
JOHNSON, PC
机构：
来源：
SURFACE & COATINGS TECHNOLOGY | 1987年 / 31卷 / 04期
关键词：
D O I：
10.1016/0257-8972(87)90157-5
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：303 / 318
页数：16
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