A STUDY OF THE INITIAL OXIDATION OF POLYCRYSTALLINE SI USING SURFACE-ANALYSIS TECHNIQUES

被引：18
|
作者：
KAZMERSKI, LL
JAMJOUM, O
IRELAND, PJ
WHITNEY, RL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词：
D O I：
10.1116/1.570964
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：960 / 964
页数：5
相关论文
共 50 条
  • [31] UP-TO-DATE TECHNIQUES FOR PRACTICAL SURFACE-ANALYSIS
    HOFMANN, S
    VACUUM, 1987, 37 (5-6) : 485 - 486
  • [32] MICROCIRCUIT SURFACE-ANALYSIS TECHNIQUES OVERCOME CONTAMINATION HAZARDS
    OCLOCK, GD
    SCHUSTER, SL
    PETERS, M
    MAY, RA
    MICROWAVES & RF, 1984, 23 (13) : 96 - &
  • [33] SELECTIVE OXIDATION SURFACE-ANALYSIS (SOSA) ON METALS AND MINERALS
    PUGH, RJ
    HUSBY, K
    SURFACE AND INTERFACE ANALYSIS, 1986, 9 (1-6) : 519 - 519
  • [34] DECONVOLUTION OF EXPERIMENTAL CURVE - APPLICATION TO TECHNIQUES OF SURFACE-ANALYSIS
    GAROT, C
    BOIZIAU, C
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1979, 34 (195): : 17 - 34
  • [35] SURFACE-ANALYSIS TECHNIQUES AND THEIR APPLICATION TO MATERIALS AND DEVICE CHARACTERIZATION
    HARRIS, PG
    TRIGG, AD
    GEC JOURNAL OF RESEARCH, 1987, 5 (02): : 88 - 98
  • [36] CHEMICAL CHARACTERIZATION OF NUCLEAR AEROSOLS BY SURFACE-ANALYSIS TECHNIQUES
    BOWSHER, BR
    NICHOLS, AL
    JOURNAL OF AEROSOL SCIENCE, 1990, 21 : S591 - S595
  • [37] INITIAL OXIDATION STAGES OF THE SI (111) SURFACE
    GARNER, CM
    LINDAU, I
    SU, CY
    SPICER, WE
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1979, 24 (03): : 277 - 278
  • [38] A SURFACE STUDY OF THE OXIDATION OF POLYCRYSTALLINE TIN
    ASBURY, DA
    HOFLUND, GB
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1132 - 1135
  • [39] QUANTITATIVE SURFACE-ANALYSIS - AGREEING INITIAL DATA-PROCESSING
    SEAH, MP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1227 - 1233
  • [40] SURFACE-ANALYSIS OF SI(111) WAFERS USING 2ND-HARMONIC GENERATION
    HILLRICHS, G
    GRAF, D
    MAROWSKY, G
    RODERS, O
    SCHNEGG, A
    WAGNER, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (11) : 3145 - 3151
12345