A STUDY OF THE INITIAL OXIDATION OF POLYCRYSTALLINE SI USING SURFACE-ANALYSIS TECHNIQUES

被引：18

|

作者：

KAZMERSKI, LL

JAMJOUM, O

IRELAND, PJ

WHITNEY, RL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

关键词：

D O I：

10.1116/1.570964

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：960 / 964

页数：5

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