DEMONSTRATION OF OXYGEN IN SILICON SINGLE-CRYSTALS USING ESR

被引：5
|
作者：
NEUBRAND, H [1 ]
机构：
[1] AEG TELEFUNKEN,FORSCH INST,FRANKFURT,WEST GERMANY
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1973年 / 17卷 / 02期
关键词：
D O I：
10.1002/pssa.2210170209
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：459 / 470
页数：12
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