DEMONSTRATION OF OXYGEN IN SILICON SINGLE-CRYSTALS USING ESR

被引：5

作者：

NEUBRAND, H ^{[1
]}

机构：

[1] AEG TELEFUNKEN,FORSCH INST,FRANKFURT,WEST GERMANY

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1973年 / 17卷 / 02期

关键词：

D O I：

10.1002/pssa.2210170209

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：459 / 470

页数：12

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