SURFACE MODIFICATIONS OF ELECTRONIC MATERIALS INDUCED BY PLASMA-ETCHING

被引：35
|
作者：
OEHRLEIN, GS
ROBEY, SW
LINDSTROM, JL
CHAN, KK
JASO, MA
SCILLA, GJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 07期
关键词：
D O I：
10.1149/1.2097160
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2050 / 2057
页数：8
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