DETERMINATION OF BORON SEGREGATION COEFFICIENT IN SILICON BY ION MICROPROBE ANALYSIS

被引:0
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作者
COLBY, JW [1 ]
KATZ, LE [1 ]
机构
[1] BELL TEL LABS INC,ALLENTOWN,PA 18103
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C91 / C91
页数:1
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