共 50 条
- [31] TECHNOLOGICAL ADVANCES IN PHYSICAL VAPOR-DEPOSITION IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1983, 6 (02): : 173 - 180
- [32] PHYSICAL VAPOR-DEPOSITION OF CHROMIUM AND IRON JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (01): : 54 - 58
- [33] PLASMA ASSISTED PHYSICAL VAPOR-DEPOSITION VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1989, 44 (245): : 9 - 12
- [35] CHARACTERIZATION AND COMPARISON OF TIN LAYERS DEPOSITED BY DIFFERENT PHYSICAL VAPOR-DEPOSITION PROCESSES SURFACE & COATINGS TECHNOLOGY, 1991, 48 (03): : 181 - 187
- [36] Vacuum Based Wafer Level Encapsulation (WLE) of MEMS Using Physical Vapor Deposition (PVD) PROCEEDINGS OF THE 2012 IEEE 14TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE, 2012, : 342 - 345
- [40] Evaporation rate and composition monitoring of electron beam physical vapor deposition processes SURFACE & COATINGS TECHNOLOGY, 1995, 76-77 (1-3): : 681 - 686