PHYSICAL VAPOR-DEPOSITION (PVD) PROCESSES .9. VACUUM EVAPORATION - VAPORIZATION SOURCES

被引：0

作者：

MATTOX, DM

机构：

来源：

PLATING AND SURFACE FINISHING | 1992年 / 79卷 / 09期

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中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

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引用

页码：54 / 55

页数：2

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