THE EFFECT OF NITROGEN INCORPORATION ON THE THERMAL-STABILITY OF TIW/AL METALLIZATION

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作者：

GLOESENER, D

PUYLAERT, G

VANDEWIELE, F

机构：

来源：

VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期

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中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

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页码：175 / 177

页数：3

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