THE EFFECT OF NITROGEN INCORPORATION ON THE THERMAL-STABILITY OF TIW/AL METALLIZATION

被引：0
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作者：
GLOESENER, D
PUYLAERT, G
VANDEWIELE, F
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：175 / 177
页数：3
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