THERMAL-STABILITY OF PROTON IMPLANTED GAAS-LAYERS

被引：0
|
作者：
TERAZONO, S [1 ]
ITOH, K [1 ]
KAWABATA, K [1 ]
NAGAHAMA, K [1 ]
NISHITANI, K [1 ]
机构：
[1] MITSUBISHI ELECTR CO,OPTOELECTR & MICROWAVE DEVICES RES LAB,ITAMI,HYOGO 664,JAPAN
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1990年 / 19卷 / 07期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1 / 1
页数：1
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