RELATIONSHIP BETWEEN SUBSTRATE BIAS AND MICROSTRUCTURE IN MAGNETRON-SPUTTERED AL-CU FILMS

被引：18
|
作者：
LIN, T
AHN, KY
HARPER, JME
MADAKSON, PB
FRYER, PM
机构：
来源：
THIN SOLID FILMS | 1987年 / 154卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(87)90354-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：81 / 89
页数：9
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