FOCUSED ION-BEAMS IN MICROFABRICATION

被引：10

作者：

SELIGER, RL ^{[1
]}

FLEMING, WP ^{[1
]}

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.1318486

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1127 / 1127

页数：1

共 50 条

[21] USE OF FOCUSED ION-BEAMS FOR ANALYSIS
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