HIGH PRODUCTION SYSTEM FOR DEPOSITION OF SILICON-NITRIDE

被引：6
|
作者：
WOHLHEITER, VD
WHITNER, RA
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 07期
关键词：
D O I：
10.1149/1.2404373
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：945 / +
页数：1
相关论文
共 50 条
  • [41] SILICON-NITRIDE CHEMICAL VAPOR-DEPOSITION IN A HOT-WALL DIFFUSION SYSTEM
    GINSBURGH, R
    HEALD, DL
    NEVILLE, RC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (09) : 1557 - 1559
  • [42] STRUCTURE OF SILICON-NITRIDE FILMS .2. NONSTOICHIOMETRIC SILICON-NITRIDE
    EDELMAN, FL
    ZAITSEV, BN
    LATUTA, VZ
    KHOROMENKO, AA
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 51 (01): : 49 - 56
  • [43] PHOTO CVD SYSTEM FOR SILICON-NITRIDE FILM
    NUMASAWA, Y
    YAMAZAKI, K
    HAMANO, K
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (01) : 27 - 30
  • [44] DEPOSITION OF SILICON DIOXIDE AND SILICON-NITRIDE BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
    LUCOVSKY, G
    RICHARD, PD
    TSU, DV
    LIN, SY
    MARKUNAS, RJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 681 - 688
  • [45] THE EFFECTS OF DEPOSITION VARIABLES ON DEPOSITION RATE IN THE CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE
    YI, KS
    KIM, JB
    KIM, KJ
    CHUN, JS
    THIN SOLID FILMS, 1987, 155 (01) : 87 - 95
  • [46] HIGH-TEMPERATURE OXIDATION OF SILICON-NITRIDE
    PUGACH, EA
    THERMOCHIMICA ACTA, 1985, 93 (SEP) : 701 - 704
  • [47] LASER-REACTIVE ABLATION DEPOSITION OF SILICON-NITRIDE FILMS
    DEGIORGI, ML
    LEGGIERI, G
    LUCHES, A
    MARTINO, M
    PERRONE, A
    MAJNI, G
    MENGUCCI, P
    ZEMEK, J
    MIHAILESCU, IN
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (03): : 275 - 283
  • [48] FIXED HYDROGEN IN SILICON-NITRIDE FILMS PREPARED BY PLASMOCHEMICAL DEPOSITION
    ALEKSANDROV, SE
    HITCHMAN, ML
    KOVALGIN, AY
    RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 1994, 67 (01) : 128 - 133
  • [49] HIGH-PERFORMANCE SILICON-NITRIDE MATERIALS
    BOBERSKI, C
    HAMMINGER, R
    PEUCKERT, M
    ALDINGER, F
    DILLINGER, R
    HEINRICH, J
    HUBER, J
    ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 1989, 28 (11) : 1560 - 1569
  • [50] SILICON-NITRIDE FOR HIGH-PERFORMANCE BEARINGS
    不详
    AMERICAN CERAMIC SOCIETY BULLETIN, 1990, 69 (07): : 1113 - 1115
12345