HIGH PRODUCTION SYSTEM FOR DEPOSITION OF SILICON-NITRIDE

被引：6
|
作者：
WOHLHEITER, VD
WHITNER, RA
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 07期
关键词：
D O I：
10.1149/1.2404373
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：945 / +
页数：1
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