HIGH PRODUCTION SYSTEM FOR DEPOSITION OF SILICON-NITRIDE

被引：6

|

作者：

WOHLHEITER, VD

WHITNER, RA

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 07期

关键词：

D O I：

10.1149/1.2404373

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：945 / +

页数：1

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