STRUCTURE OF SLOW CRACK INTERFACES IN SILICON-NITRIDE

被引：26
|
作者：
TIGHE, NJ
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1978年 / 13卷 / 07期
关键词：
D O I：
10.1007/BF00553199
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1455 / 1463
页数：9
相关论文
共 50 条
  • [1] ENVIRONMENTAL-EFFECTS ON SLOW CRACK-GROWTH IN SILICON-NITRIDE
    HENAGER, CH
    JONES, RH
    [J]. JOURNAL OF METALS, 1987, 39 (10): : A48 - A48
  • [2] STRUCTURE OF SILICON-NITRIDE FILMS .2. NONSTOICHIOMETRIC SILICON-NITRIDE
    EDELMAN, FL
    ZAITSEV, BN
    LATUTA, VZ
    KHOROMENKO, AA
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 51 (01): : 49 - 56
  • [3] COMPOSITIONAL DEPTH PROFILING OF SILICON-NITRIDE INTERFACES
    WURZBACH, JA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C77 - C78
  • [4] STRUCTURE OF SILICON-NITRIDE FILMS
    EDELMAN, FL
    [J]. INORGANIC MATERIALS, 1979, 15 (04) : 506 - 511
  • [5] CRACK DETECTION IN SILICON-NITRIDE BY ACOUSTIC MICROSCOPY
    LAWRENCE, CW
    SCRUBY, CB
    BRIGGS, GAD
    DUNHILL, A
    [J]. NDT INTERNATIONAL, 1990, 23 (01): : 3 - 10
  • [6] SILICON-NITRIDE AMORPHOUS-SILICON INTERFACES IN AN MIS JUNCTION
    HATANAKA, Y
    KAWAI, S
    SUZUKI, Y
    ASAI, Y
    SHIMAOKA, G
    [J]. APPLIED SURFACE SCIENCE, 1988, 33-4 : 792 - 796
  • [7] TRIBOLOGY OF SILICON-NITRIDE SILICON-NITRIDE AND SILICON-NITRIDE STEEL SLIDING PAIRS
    SUTOR, PA
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1983, 62 (11): : 1246 - 1246
  • [8] STRUCTURE OF INTERFACES IN AMORPHOUS-SILICON SILICON-NITRIDE SUPERLATTICES DETERMINED BY INSITU OPTICAL REFLECTANCE
    YANG, L
    ABELES, B
    PERSANS, PD
    [J]. APPLIED PHYSICS LETTERS, 1986, 49 (11) : 631 - 633
  • [9] NATURE OF PLANAR INTERFACES IN REACTION SINTERED SILICON-NITRIDE
    MARQUIS, PM
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1974, 53 (04): : 392 - &
  • [10] ON THE MECHANISM OF FATIGUE CRACK-GROWTH IN SILICON-NITRIDE
    OKAZAKI, M
    MCEVILY, AJ
    TANAKA, T
    [J]. METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1991, 22 (06): : 1425 - 1434
12345