STRUCTURE OF SILICON-NITRIDE FILMS

被引：0
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作者：
EDELMAN, FL
机构：
来源：
INORGANIC MATERIALS | 1979年 / 15卷 / 04期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：506 / 511
页数：6
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