DETERMINATION OF THIN OXIDE FILM THICKNESS BY INTEGRATED INTENSITY MEASUREMENTS

被引:11
|
作者
BORIE, B
SPARKS, CJ
机构
来源
ACTA CRYSTALLOGRAPHICA | 1961年 / 14卷 / 06期
关键词
D O I
10.1107/S0365110X61001832
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:569 / &
相关论文
共 50 条
  • [31] Determination of optical constants and thickness of amorphous GaP thin film
    Pimpabute, Nuwat
    Burinprakhon, Thanusit
    Somkhunthot, Weerasak
    OPTICA APPLICATA, 2011, 41 (01) : 257 - 268
  • [32] VERY THIN ANODIC FILM THICKNESS DETERMINATION - A SURVEY OF METHODS
    MORA, R
    PLATING AND SURFACE FINISHING, 1987, 74 (05): : 36 - 36
  • [33] A determination by spectrometer of the metrical thickness and dispersive power of a thin film
    Darbyshire, O
    PROCEEDINGS OF THE PHYSICAL SOCIETY, 1934, 46 : 626 - 630
  • [34] EUV reflectometry for thickness and density determination of thin film coatings
    S. Döring
    F. Hertlein
    A. Bayer
    K. Mann
    Applied Physics A, 2012, 107 : 795 - 800
  • [35] Virtual substrate model for in situ thin film thickness determination
    Navarro, M
    Fandiño, J
    SURFACE ENGINEERING, 2000, 16 (01) : 70 - 72
  • [36] Ceramic thin film thickness determination by nano-indentation
    Marie, S
    Nadal, M
    Ducarroir, M
    Felder, E
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1997, 16 (09) : 722 - 725
  • [37] EUV reflectometry for thickness and density determination of thin film coatings
    Doering, S.
    Hertlein, F.
    Bayer, A.
    Mann, K.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2012, 107 (04): : 795 - 800
  • [38] VERY THIN ANODIC FILM THICKNESS DETERMINATION - A SURVEY OF METHODS
    MORA, R
    PLATING AND SURFACE FINISHING, 1987, 74 (02): : 43 - 43
  • [39] Interface coupling and film thickness measurement on thin oxide thin film fully depleted SOI MOSFETs
    Cassé, M
    Poiroux, T
    Faynot, O
    Raynaud, C
    Tabone, C
    Allain, F
    Reimbold, G
    ESSDERC 2003: PROCEEDINGS OF THE 33RD EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, 2003, : 87 - 90
  • [40] Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements
    Cardin, Julien
    Leduc, Dominique
    APPLIED OPTICS, 2008, 47 (07) : 894 - 900