DETERMINATION OF THIN OXIDE FILM THICKNESS BY INTEGRATED INTENSITY MEASUREMENTS

被引:11
|
作者
BORIE, B
SPARKS, CJ
机构
来源
ACTA CRYSTALLOGRAPHICA | 1961年 / 14卷 / 06期
关键词
D O I
10.1107/S0365110X61001832
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:569 / &
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