TISI2 POLYCRYSTALLINE SILICON - ARSENIC DISTRIBUTION AND SI GRAIN-GROWTH

被引：6
|
作者：
ZHENG, LR
HUNG, LS
PHILLIPS, JR
MAYER, JW
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 11期
关键词：
D O I：
10.1063/1.339080
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4426 / 4432
页数：7
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