SIMPLE ION-SOURCE FOR TARGET PREPARATION VIA ION-BEAM SPUTTERING

被引：3
|
作者：
NOLEN, JA [1 ]
CURTIN, MS [1 ]
DYSON, TE [1 ]
机构：
[1] MICHIGAN STATE UNIV,DEPT PHYS,E LANSING,MI 48824
来源：
NUCLEAR INSTRUMENTS & METHODS | 1978年 / 150卷 / 03期
关键词：
D O I：
10.1016/0029-554X(78)90131-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：581 / 583
页数：3
相关论文
共 50 条
  • [21] ION-BEAM ETCHING OF PHOTOMASKS BY MEANS OF AN ION-SOURCE FROM A DOUBLE CATHODE
    SPANGENBERG, B
    HAMMER, K
    ROTHE, R
    PRZYBOROWSKI, F
    DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE, 1985, 38 (11): : 1485 - 1488
  • [22] EFFECTS OF ION-SOURCE PARAMETERS ON ION-BEAM ENERGY IN MASS-SPECTROMETRY
    QIAN, KN
    SHUKLA, A
    FUTRELL, J
    ANALYTICAL CHEMISTRY, 1990, 62 (14) : 1547 - 1549
  • [23] ION-BEAM EXTRACTION WITH ION SPACE-CHARGE COMPENSATION IN BEAM-PLASMA TYPE ION-SOURCE
    ISHIKAWA, J
    SANO, F
    TAKAGI, T
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) : 6018 - 6028
  • [24] RF-BROAD-BEAM ION-SOURCE FOR REACTIVE SPUTTERING
    LOSSY, R
    ENGEMANN, J
    VACUUM, 1986, 36 (11-12) : 973 - 976
  • [25] ION-BEAM SPUTTERING OF FLUOROPOLYMERS
    SOVEY, JS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 813 - 816
  • [26] ION-BEAM SPUTTERING OF POLYMERS
    DWIGHT, DW
    MCCARTNEY, SRF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1984, 187 (APR): : 99 - PMSE
  • [27] Patterning by ion-beam sputtering
    Joe, M.
    Choi, C.
    Kahng, B.
    Kwak, C. Y.
    Kim, J. -S.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 52 : S181 - S188
  • [28] DEVELOPMENT OF BORON LIQUID-METAL ION-SOURCE FOR FOCUSED ION-BEAM SYSTEM
    HIGUCHIRUSLI, RH
    CADIEN, KC
    CORELLI, JC
    STECKL, AJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 190 - 194
  • [29] SOME CHARACTERISTICS OF MULTIPLY CHARGED ARGON ION-BEAM DELIVERED BY TRIPLEMAFIOS ION-SOURCE
    BEX, L
    BRIAND, P
    DEBERNARDI, J
    CHANTUNG, N
    GELLER, R
    JACQUOT, B
    COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES SERIE B, 1976, 283 (14): : 393 - 396
  • [30] 100-MA LOW-EMITTANCE ION-SOURCE FOR ION-BEAM FUSION
    VAHRENKAMP, RP
    SELIGER, RL
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (03) : 3101 - 3103
12345